Investigation of Surface Properties of Spray-Deposited V2O5 Thin Films
- Popescu A.G.M., Tudose I.V., Romanițan C., Brîncoveanu O., Gavrilă R., Manica M., Pachiu C., Șchiopu P., Vlădescu M., Suchea M.P., „Investigation of Surface Properties of Spray-Deposited V2O5 Thin Films” IEEE 2025 International Semiconductor Conference (CAS), Octombrie
- https://doi.org/10.1109/CAS66707.2025.11222283
Abstract:
This study investigates the effect of precursor solution volume on the crystallinity and surface morphology of vanadium pentoxide thin films deposited on indium tin oxide (ITO) substrates via spray pyrolysis. A fixed molar concentration (0.02 M) of precursor was used, with deposition volumes ranging from 2 to 10 mL. Post-deposition annealing was performed in two steps at 400° C and 450° C to enhance the crystal quality. becoming more defined. Scanning electron microscopy (SEM) and atomic force microscopy (AFM) analyses showed that increasing the precursor volume leads to the formation of larger, more interconnected grains and rougher surface. These microstructural improvements suggest that controlling precursor volume is a key parameter for tailoring surface-active films, making them promising candidates for gas sensing and other surface-dependent electronic applications.
Date of Conference: 07-11 October 2025
Date Added to IEEE Xplore: 06 November 2025